From nlatta at stanford.edu  Thu Mar  7 14:09:16 2013
From: nlatta at stanford.edu (nlatta at stanford.edu)
Date: Thu, 7 Mar 2013 14:09:16 -0800 (PST)
Subject: [mrc-pcs] Comment mrc SNF 2013-03-07 14:09:15: Sputtering
 deposition starting to build up
Message-ID: <27157934.104.1362694156745.JavaMail.coral@snc-coraldb.stanford.edu>

on anode, pryex shield, quartz plate and quartz ring.  The top of the lid seems to be thinking about getting flakey.

From pchsu918 at stanford.edu  Mon Mar 18 17:53:12 2013
From: pchsu918 at stanford.edu (pchsu918 at stanford.edu)
Date: Mon, 18 Mar 2013 17:53:12 -0700 (PDT)
Subject: [mrc-pcs] Comment mrc SNF 2013-03-18 17:53:12: MRC wasn't at
 stand-by condition
Message-ID: <29947292.0.1363654392976.JavaMail.coral@snc-coraldb.stanford.edu>

1. The foreline valve was closed, and the rough valve was open.
2. The gas valve at behind was off
3. SF6 and O2 flow control was set at auto, although the set points were zero.

From nlatta at stanford.edu  Tue Mar 19 11:37:36 2013
From: nlatta at stanford.edu (nlatta at stanford.edu)
Date: Tue, 19 Mar 2013 11:37:36 -0700 (PDT)
Subject: [mrc-pcs] Problem mrc SNF 2013-03-19 11:37:36: couldn't tune RF!
Message-ID: <26687282.17.1363718256730.JavaMail.coral@snc-coraldb.stanford.edu>

I am completely lost!

From elmere at stanford.edu  Wed Mar 20 09:03:27 2013
From: elmere at stanford.edu (elmere at stanford.edu)
Date: Wed, 20 Mar 2013 09:03:27 -0700 (PDT)
Subject: [mrc-pcs] Problem mrc SNF 2013-03-19 11:37:36: couldn't tune RF!
Message-ID: <13213299.33.1363795407781.JavaMail.coral@snc-coraldb.stanford.edu>

Cleaned underneath the electrode.  Ran an Ar plasma with no problems.

From nlatta at stanford.edu  Wed Mar 20 16:42:08 2013
From: nlatta at stanford.edu (nlatta at stanford.edu)
Date: Wed, 20 Mar 2013 16:42:08 -0700 (PDT)
Subject: [mrc-pcs] Comment mrc SNF 2013-03-18 17:53:12: MRC wasn't at
 stand-by condition
Message-ID: <5789201.66.1363822928413.JavaMail.coral@snc-coraldb.stanford.edu>

spoke with user

From nlatta at stanford.edu  Wed Mar 20 16:42:37 2013
From: nlatta at stanford.edu (nlatta at stanford.edu)
Date: Wed, 20 Mar 2013 16:42:37 -0700 (PDT)
Subject: [mrc-pcs] Comment mrc SNF 2013-03-07 14:09:15: Sputtering
 deposition starting to build up
Message-ID: <6166727.67.1363822957482.JavaMail.coral@snc-coraldb.stanford.edu>

Thanks Crew for cleaning everything

From nlatta at stanford.edu  Wed Mar 20 16:42:58 2013
From: nlatta at stanford.edu (nlatta at stanford.edu)
Date: Wed, 20 Mar 2013 16:42:58 -0700 (PDT)
Subject: [mrc-pcs] Comment mrc SNF 2013-01-17 11:15:54: maintenance work
Message-ID: <14245959.68.1363822978537.JavaMail.coral@snc-coraldb.stanford.edu>

archived

From nlatta at stanford.edu  Wed Mar 20 16:43:17 2013
From: nlatta at stanford.edu (nlatta at stanford.edu)
Date: Wed, 20 Mar 2013 16:43:17 -0700 (PDT)
Subject: [mrc-pcs] Comment mrc SNF 2013-01-08 16:29:06: Jan qual- after
	shutdown
Message-ID: <20129879.69.1363822997589.JavaMail.coral@snc-coraldb.stanford.edu>

archived