MRC Status

Jim McVittie mcvittie at cis.Stanford.EDU
Fri Feb 9 15:21:31 PST 2001

MRC Users,

We got the new quartz feedthru and it has been installed it. This has
significantly reduced the leak rate but has not eliminated it. The present
leak rate (~ 30 mT/min) is about equal to a flow of 1 sccm of air into the
etch chamber. I expect that this leak will not affect your etching in the
MRC. In the next week we will hook up the leak detector on to the chamber
to find the leak and get the leak rate back to where it belongs (< 1

James P. McVittie	                Senior Research Scientist
Allen Center for Integrated Systems     jmcvittie at
Stanford University             	Tel: (650) 725-3640	
Rm. 336, 330 Serra Mall			Fax: (650) 723-4659
Stanford, CA 94305-4075	

More information about the mrc mailing list