From ziebarth at stanford.edu  Thu Mar 28 10:43:53 2002
From: ziebarth at stanford.edu (Jonathan Mickle Ziebarth)
Date: Thu, 28 Mar 2002 10:43:53 -0800 (PST)
Subject: ITO
Message-ID: <Pine.GSO.4.33.0203281035010.25793-100000@saga5.Stanford.EDU>

Hello,
I am interested in using the mrc to etch ITO. I was wondering whether
anyone has any experience doing this.
I plan to use photoresist as a mask and I need to etch down about 100
nm.
Any etch recipe suggestions would be greatly appreciated.
Thanks,
Jonathan