ITO

Jonathan Mickle Ziebarth ziebarth at stanford.edu
Thu Mar 28 10:43:53 PST 2002


Hello,
I am interested in using the mrc to etch ITO. I was wondering whether
anyone has any experience doing this.
I plan to use photoresist as a mask and I need to etch down about 100
nm.
Any etch recipe suggestions would be greatly appreciated.
Thanks,
Jonathan





More information about the mrc mailing list