From arvisun at stanford.edu  Wed May 22 15:37:46 2002
From: arvisun at stanford.edu (arvind sundaramurthy)
Date: Wed, 22 May 2002 15:37:46 -0700
Subject: Plasma Etching Gold
Message-ID: <00a101c201e1$4bd7d2e0$865540ab@stanford.edu>

hi,
I would like to get in touch with anybody who has plasma etched gold using a resist mask with the MRC etcher. I am looking for some info about typical etch parameters used and etching rates of Gold & resist.

Thanks a lot,

arvind
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