Plasma Etching Gold

arvind sundaramurthy arvisun at stanford.edu
Wed May 22 15:37:46 PDT 2002


hi,
I would like to get in touch with anybody who has plasma etched gold using a resist mask with the MRC etcher. I am looking for some info about typical etch parameters used and etching rates of Gold & resist.

Thanks a lot,

arvind
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