booth at snf.stanford.edu
Tue Apr 1 08:39:19 PST 2003
Our last supply of Freon-115 is getting low
and will probably be empty in the next few weeks.
When this happens, we plan to install Freon-22 as
the replacement etch gas for the Dryteks & the MRC.
Jim McVittie has done testing of the etch characteristics
of Freon-115 last year, and can provide info on the
process issues that you may experience.
I will send an e-mail announcement when the
gas supply is changed from F-115 to F-22.
More information about the mrc