Ar+ sputter etching Au on AlGaAs

Vincenzo Lordi vlordi at
Mon Jan 24 18:35:07 PST 2005


I am wondering if anyone has any experience in using an Ar+ sputter 
etch to etch Au lines using e-beam patterned photoresist. I need to 
etch lines ranging from 40nm to 100nm in width and 20nm deep into Au 
that is deposited on top of AlGaAs, preferably through an e-beam 
defined photoresist mask.

Any information would be useful, even if your experience is not 
directly with Au. Typical conditions and etch rates of metal vs. 
photoresist would be helpful, as well as suggestions to point me in 
the right direction to work out this process.


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