Metal sputter etching on MRC

Morgan Mager mager at
Wed Aug 2 10:30:40 PDT 2006

   I was wondering if anyone has experience with argon sputter etches of
metals on the MRC. In particular, I'm interested in recipes and etch rates
for Au, Ti and Cr, but information for any metals would be a helpful
starting point. Also, has anyone tried adding any of the freon gases to an
argon etch to chemically increase the etch rate of Ti? Thanks in advance
for any help.


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