From ashwin at slac.stanford.edu  Tue Sep 26 23:00:46 2006
From: ashwin at slac.stanford.edu (Tulapurkar, Ashwin)
Date: Tue, 26 Sep 2006 23:00:46 -0700
Subject: sputter etching of metals
Message-ID: <274E6BE39062274CAF5C7153C839FD049F9732@exch-mail1.win.slac.stanford.edu>

Hi
I want to sputter-etch Al, Co and Au in MRC. Does any one know the etch rates and etch parameters for them?
 
Thanks.
-Ashwin