MRC Recipe for Etching Tungsten

Jenny Hu jennyhu at stanford.edu
Tue May 22 18:03:35 PDT 2007


Hello,

I am new to the MRC.  Does anyone have a recipe for etching tungsten,  
with a rough etch rate? Preferably with some selectivity to  
photoresist, since I need to etch 500A through pattern photoresist.

Thanks,
Jenny



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