From xiangyuc at stanford.edu  Wed Apr  8 18:32:41 2009
From: xiangyuc at stanford.edu (Xiangyu Chen)
Date: Wed, 8 Apr 2009 18:32:41 -0700
Subject: Information about CF4 etching?
Message-ID: <34531452D00947B78C6AFEA925BDEDC9@hp95c9861c2712>

Hello fellow Drytek1/MRC users:

 

I'm wondering if anyone has done CF4 etching on either Drytek1 or MRC? Could
you please tell me more about the etching recipe you used, and maybe etching
rate data on your particular material? I'm trying to do CF4 plasma etching
of SiO2, and I need the etching to be as isotropic as it can be. If you have
done similar experiments, could you please contact me? I really appreciate
it!! Thank you very much!

 

Helen Chen

 

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From zguo at stanford.edu  Tue Apr 28 12:41:32 2009
From: zguo at stanford.edu (Zhiqiang Guo)
Date: Tue, 28 Apr 2009 12:41:32 -0700 (PDT)
Subject: mrc finished but can not be disabled by coral
Message-ID: <1800931062.711481240947692733.JavaMail.root@zm01.stanford.edu>

I finished, but coral is down now, I can not disable it. any user could please help disable or overenable when coral is fine.

Thanks,

Zhiqiang