Information about CF4 etching?

Xiangyu Chen xiangyuc at
Wed Apr 8 18:32:41 PDT 2009

Hello fellow Drytek1/MRC users:


I'm wondering if anyone has done CF4 etching on either Drytek1 or MRC? Could
you please tell me more about the etching recipe you used, and maybe etching
rate data on your particular material? I'm trying to do CF4 plasma etching
of SiO2, and I need the etching to be as isotropic as it can be. If you have
done similar experiments, could you please contact me? I really appreciate
it!! Thank you very much!


Helen Chen


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