mrc problem

Zhiqiang Guo zguo at
Tue May 19 18:01:29 PDT 2009

I am using 15sccm Oxygen and toggle on at 25mtorr, want to reach 150 watt, but however I change the input and load tune, it will not reach more than 50 watt and automatic distinguish.

I did the same recipe a lot of times before. There must be something wrong with the machine. Could someone have it fixed?



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