mrc problem

Zhiqiang Guo zguo at stanford.edu
Tue May 19 18:01:29 PDT 2009


I am using 15sccm Oxygen and toggle on at 25mtorr, want to reach 150 watt, but however I change the input and load tune, it will not reach more than 50 watt and automatic distinguish.

I did the same recipe a lot of times before. There must be something wrong with the machine. Could someone have it fixed?

Thanks,

Zhiqiang



More information about the mrc mailing list