From zguo at stanford.edu Thu Oct 8 17:09:20 2009 From: zguo at stanford.edu (Zhiqiang Guo) Date: Thu, 8 Oct 2009 17:09:20 -0700 (PDT) Subject: mrc Friday 8am slot removed Message-ID: <1759983647.2503781255046960217.JavaMail.root@zm01.stanford.edu> From liangjl at stanford.edu Fri Oct 30 17:06:05 2009 From: liangjl at stanford.edu (Jiale Liang) Date: Fri, 30 Oct 2009 17:06:05 -0700 Subject: MRC Recipy for Si etching Message-ID: Hi MRC Community, I'm looking for a recipy for Si etching which gives straight sidewall (anisotropic). The etching thickness is ~400nm. I don't have a stoping layer so selective is not a issue for me. Does anyone have a good starting recipy? Thanks! Best, Jiale -------------- next part -------------- An HTML attachment was scrubbed... URL: