From ntayebi at stanford.edu  Mon Feb 15 12:55:29 2010
From: ntayebi at stanford.edu (Noureddine Tayebi)
Date: Mon, 15 Feb 2010 12:55:29 -0800 (PST)
Subject: Si etching recipe?
Message-ID: <997734086.605301266267329806.JavaMail.root@zm02.stanford.edu>

Hi Everyone,

Does anyone have a calibrated Si etching recipe using mrc, preferably with SF6? Please let me know.

Thanks,

Noureddine


From mtang at stanford.edu  Sun Feb 21 05:20:15 2010
From: mtang at stanford.edu (Mary Tang)
Date: Sun, 21 Feb 2010 05:20:15 -0800
Subject: Warning:  No CF4 gas
Message-ID: <4B81330F.8080509@stanford.edu>

Apologies everyone, but it looks like the CF4 cylinder has run dry.  
This affects drytek1/2, mrc, p5000etch, pquest, sts (dep) and lampoly.  
We will address this as soon as possible.

Your SNF Staff


-- 
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu



From mtang at stanford.edu  Mon Feb 22 13:21:47 2010
From: mtang at stanford.edu (Mary Tang)
Date: Mon, 22 Feb 2010 13:21:47 -0800
Subject: Warning:  No CF4 gas
In-Reply-To: <4B81330F.8080509@stanford.edu>
References: <4B81330F.8080509@stanford.edu>
Message-ID: <4B82F56B.1020204@stanford.edu>

Hi all --


The CF4 cylinder has been replaced.  Although the cylinder change is 
routine and no problems are anticipated, staff have not yet run etch 
rates.  Please check before running your critical material and let us 
know if you observe problems.


Your SNF Staff



Mary Tang wrote:
> Apologies everyone, but it looks like the CF4 cylinder has run dry.  
> This affects drytek1/2, mrc, p5000etch, pquest, sts (dep) and 
> lampoly.  We will address this as soon as possible.
>
> Your SNF Staff
>
>


-- 
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu