From kodama at stanford.edu  Sat Jul 10 17:19:04 2010
From: kodama at stanford.edu (Takashi Kodama)
Date: Sat, 10 Jul 2010 17:19:04 -0700 (PDT)
Subject: recipe for silicon etching
Message-ID: <1050701273.617642.1278807544247.JavaMail.root@zm09.stanford.edu>


Hi All,

I plan to carry out the silicon etching by using mrc.
I suppose SF6 should be used for that, but I could not find any appropriate recipes
in the log book. If some of you have an experience to do that, could you tell me your
etching condition?

Thanks so much for your help.

Takashi Kodama
kodama at stanford.edu