recipe for silicon etching

Takashi Kodama kodama at
Sat Jul 10 17:19:04 PDT 2010

Hi All,

I plan to carry out the silicon etching by using mrc.
I suppose SF6 should be used for that, but I could not find any appropriate recipes
in the log book. If some of you have an experience to do that, could you tell me your
etching condition?

Thanks so much for your help.

Takashi Kodama
kodama at

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