Raising the horns -- and then removing them (Pt etch question)
mihirt at stanford.edu
Thu Jun 17 15:21:58 PDT 2010
Hi MRC users,
I've discovered that when I sputter etch Pt in the MRC, using the recipe listed in the logbook, I get substantial redeposition at the corners of my features, resulting in "horns" that short out my devices.
I am going to try depositing at a higher pressure to get a more isotropic etch and hopefully get rid of these features. Has anyone found a recipe that works well for this purpose? Sidewall sharpness is not critical for me.
Thanks in advance.
Applied Physics PhD Candidate
Nishi Group, Stanford University
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