From mihirt at stanford.edu  Mon May  3 11:57:43 2010
From: mihirt at stanford.edu (Mihir Tendulkar)
Date: Mon, 3 May 2010 11:57:43 -0700 (PDT)
Subject: Good recipe for SPR 3612 descum?
In-Reply-To: <466708884.26505.1272912806747.JavaMail.root@zm01.stanford.edu>
Message-ID: <1891311272.26722.1272913063377.JavaMail.root@zm01.stanford.edu>

Hi MRC users, 

I've been etching contact holes in 40nm of SiO2 down to Pt using SPR 3612 as a mask. My recipe is 2sccm O2 + 15 sccm CHF3, 25mT, 100 W. 

I found lots of residue on my Pt afterward. At the suggestion of another labmember, I used more O2 in my plasma, but that wasn't effective. A 100% O2 plasma gets rid of most of it, but not all.  

Does anyone have an effective MRC recipe for cleaning residue? I'm also open to using other tools. 

Thanks! 

-- 
Mihir Tendulkar
Applied Physics PhD Candidate
Nishi Group, Stanford University


From jimkruger at yahoo.com  Sat May 29 18:39:03 2010
From: jimkruger at yahoo.com (jim kruger)
Date: Sat, 29 May 2010 18:39:03 -0700 (PDT)
Subject: MRC gas whitney valve
In-Reply-To: <716708926.942222.1275162759173.JavaMail.root@zm08.stanford.edu>
Message-ID: <30522.73108.qm@web38903.mail.mud.yahoo.com>

My note is to encourage ?users to follow the training: ?Leave the valve in the position last used.?If you really feel it necessary to close the valve to reduce the small chance that some freon might leak into your process, pump down the line or you have done no good.

If the valve is left closed, I don't know which gas was last used so must waste time pumping the line before switching to the Freon I need.
Thanks
--- On Sat, 5/29/10, Kyung Hoae Koo <koo1028 at stanford.edu> wrote:

From: Kyung Hoae Koo <koo1028 at stanford.edu>
Subject: MRC gas whitney valve
To: "jim kruger" <jimkruger at yahoo.com>
Date: Saturday, May 29, 2010, 12:52 PM

Hi Jim,

Today morning, I first tried to sputter Pd with Ar in MRC and saw your message about the whitney valve. I thought I shouldn't close the freon gas valve unless I know how to deal with that. What do you mean by I shouldn't close it unless I pump down the line? Can you give me more detail or procedure about it before I etch my Pd pad? 

Thank you

Kyunghoae? 



      
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