Good recipe for SPR 3612 descum?

Mihir Tendulkar mihirt at
Mon May 3 11:57:43 PDT 2010

Hi MRC users, 

I've been etching contact holes in 40nm of SiO2 down to Pt using SPR 3612 as a mask. My recipe is 2sccm O2 + 15 sccm CHF3, 25mT, 100 W. 

I found lots of residue on my Pt afterward. At the suggestion of another labmember, I used more O2 in my plasma, but that wasn't effective. A 100% O2 plasma gets rid of most of it, but not all.  

Does anyone have an effective MRC recipe for cleaning residue? I'm also open to using other tools. 


Mihir Tendulkar
Applied Physics PhD Candidate
Nishi Group, Stanford University

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