Good recipe for SPR 3612 descum?

Mihir Tendulkar mihirt at stanford.edu
Mon May 3 11:57:43 PDT 2010


Hi MRC users, 

I've been etching contact holes in 40nm of SiO2 down to Pt using SPR 3612 as a mask. My recipe is 2sccm O2 + 15 sccm CHF3, 25mT, 100 W. 

I found lots of residue on my Pt afterward. At the suggestion of another labmember, I used more O2 in my plasma, but that wasn't effective. A 100% O2 plasma gets rid of most of it, but not all.  

Does anyone have an effective MRC recipe for cleaning residue? I'm also open to using other tools. 

Thanks! 

-- 
Mihir Tendulkar
Applied Physics PhD Candidate
Nishi Group, Stanford University



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