Anyone using O2/CHF3 with 15 minutes to spare

Alex Neuhausen alexneu at
Thu Sep 30 17:22:06 PDT 2010

Hi MRC users,
The tool is fully booked over the next few days and I'd like to do a short
oxide etch. If anyone will be doing a compatible process and thinks they'll
have 15 minutes free, please let me know. Or if you're not doing a
compatible process and have 45 minutes so I can season the chamber first,
please also let me know.

Alex Neuhausen
PhD Candidate Electrical Engineering
Goldhaber-Gordon Lab
476 Lomita Mall
Stanford, CA 94305
Office: 650-725-2047
Cell: 650-776-5672
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