From jasonlin at stanford.edu  Fri Oct 14 19:05:51 2011
From: jasonlin at stanford.edu (J. Jason Lin)
Date: Fri, 14 Oct 2011 19:05:51 -0700
Subject: MRC released tonight 9pm - midnight
Message-ID: <CA+JW7yFX3sVYoH6Px-mE5+HHTFKf8r2HQ6iMwdtmrcfVw7ouGw@mail.gmail.com>

Need some more time for my samples
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From jasonlin at stanford.edu  Tue Oct 18 13:42:09 2011
From: jasonlin at stanford.edu (J. Jason Lin)
Date: Tue, 18 Oct 2011 13:42:09 -0700
Subject: mrc free 3pm - 6pm
Message-ID: <CA+JW7yFxdSsSyJ=kgpFTjX2Cf7fn3A7k=Q3E_p+RROF5HSmbOw@mail.gmail.com>

Decided not to use due to resist burning problem
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From mtang at stanford.edu  Wed Oct 26 10:22:25 2011
From: mtang at stanford.edu (Mary Tang)
Date: Wed, 26 Oct 2011 10:22:25 -0700
Subject: Facilities work is completed
Message-ID: <4EA841D1.4060005@stanford.edu>

Hi all --

Facilities work is completed ahead of schedule.  These systems are again 
available for use.

Team Etch

-- 
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
Paul G. Allen Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu



From mtang at stanford.edu  Wed Oct 26 10:23:50 2011
From: mtang at stanford.edu (Mary Tang)
Date: Wed, 26 Oct 2011 10:23:50 -0700
Subject: Fwd: Facilities work is completed
Message-ID: <4EA84226.2040401@stanford.edu>

Oops, sorry, this was not meant for MRC, but for amtetcher.  MRC has 
it's turn on Friday.

M

-------- Original Message --------
Subject: 	Facilities work is completed
Date: 	Wed, 26 Oct 2011 10:22:25 -0700
From: 	Mary Tang <mtang at stanford.edu>
To: 	drytek2 at snf.stanford.edu, mrc at snf.stanford.edu, 
pquest at snf.stanford.edu



Hi all --

Facilities work is completed ahead of schedule.  These systems are again
available for use.

Team Etch

-- 
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
Paul G. Allen Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu


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From roopalik at stanford.edu  Wed Oct 26 18:26:24 2011
From: roopalik at stanford.edu (Roopali Kukreja)
Date: Wed, 26 Oct 2011 18:26:24 -0700 (PDT)
Subject: Releasing reservation starting at 7pm today
Message-ID: <1884644664.2745514.1319678784279.JavaMail.root@zm06.stanford.edu>


Hello All,

I am releasing my reservation starting at 7 pm today, sorry for such a late notice, but my earlier process didnt work!

From
Roopali




From zguo at stanford.edu  Thu Oct 27 00:15:24 2011
From: zguo at stanford.edu (Zhiqiang Guo)
Date: Thu, 27 Oct 2011 00:15:24 -0700 (PDT)
Subject: mrc shut down
Message-ID: <311751461.1347237.1319699724527.JavaMail.root@zm01.stanford.edu>

Tried several times, MRC base pressure is around 10~20 mtorr after gate valve is fully opened. After adding oxygen plasma, the pressure is around 88 mtorr and can not be lower. So guess there might be some leakage? and shunted down the machine.

Zhiqiang