mrc shut down

Zhiqiang Guo zguo at stanford.edu
Thu Oct 27 00:15:24 PDT 2011


Tried several times, MRC base pressure is around 10~20 mtorr after gate valve is fully opened. After adding oxygen plasma, the pressure is around 88 mtorr and can not be lower. So guess there might be some leakage? and shunted down the machine.

Zhiqiang



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