From jasonlin at stanford.edu  Fri Sep  2 12:29:21 2011
From: jasonlin at stanford.edu (J. Jason Lin)
Date: Fri, 2 Sep 2011 12:29:21 -0700
Subject: mrc released 1p - 4p
Message-ID: <CA+JW7yED0gY8OOr9fYgtCf-zkAOFLQ+_iHeEhvKS+GcuSFeRdA@mail.gmail.com>

Took later slot
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From jasonlin at stanford.edu  Fri Sep  2 15:55:07 2011
From: jasonlin at stanford.edu (J. Jason Lin)
Date: Fri, 2 Sep 2011 15:55:07 -0700
Subject: MRC released tonight 6 - 9pm
Message-ID: <CA+JW7yHcdfpqJXbvORSn3YuzvykQX1SijNRFR5UtobPcOO-w5w@mail.gmail.com>

other tool is down.
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From ranidaw at stanford.edu  Thu Sep 29 10:03:40 2011
From: ranidaw at stanford.edu (Ranida Wongpiya)
Date: Thu, 29 Sep 2011 10:03:40 -0700 (PDT)
Subject: Etching copper
Message-ID: <1154757464.1521479.1317315820749.JavaMail.root@zm07.stanford.edu>

Hi,

Has anyone try to etch copper using MRC? I tried using Ar (15sccm) according to the recipe available. But it didn't seem to etch through. Any suggestions? Thank you so much!

Best,
Ranida