From wslee at stanford.edu  Thu Apr 12 09:27:22 2012
From: wslee at stanford.edu (Scott Lee)
Date: Thu, 12 Apr 2012 09:27:22 -0700
Subject: mrc free till 11am
Message-ID: <CAC8qUHAMJbQsXJtFU2Qnht64_fKGjd205J1tE3m6uEmwM-5kuw@mail.gmail.com>

Reservation released - sorry for the late notice.

Scott
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From wslee at stanford.edu  Fri Apr 13 11:11:30 2012
From: wslee at stanford.edu (Scott Lee)
Date: Fri, 13 Apr 2012 11:11:30 -0700
Subject: Cr etching
Message-ID: <CAC8qUHCjeeSbg=Q9hPkCGPpnymdeMRZ-qD1B=RKwxgXSjb8yEw@mail.gmail.com>

Hi all,

I'm trying to etch ~20nm of Cr using a plasma etch. Looking at the
literature, it looks like I need a Cl/O plasma. Does anyone have experience
etching Cr?

Thanks,
Scott
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