From zguo at stanford.edu  Sat Jul 21 00:11:16 2012
From: zguo at stanford.edu (Zhiqiang Guo)
Date: Sat, 21 Jul 2012 00:11:16 -0700 (PDT)
Subject: MRC slot released due to RF power short
In-Reply-To: <1718162171.42130028.1342854500515.JavaMail.root@zm01.stanford.edu>
Message-ID: <1519080982.42130264.1342854676280.JavaMail.root@zm01.stanford.edu>

RF power will not last for more than 3 minutes for oxygen plasma recipe, which is not enough for my process.


From jouyang at stanford.edu  Sat Jul 21 09:36:45 2012
From: jouyang at stanford.edu (Joanie Ouyang)
Date: Sat, 21 Jul 2012 09:36:45 -0700 (PDT)
Subject: =?utf-8?B?UmU6IE1SQyBzbG90IHJlbGVhc2VkIGR1ZSB0byBSRiBwb3dlciBzaG9ydA==?=
Message-ID: <0D52913F-B50D-48DE-B0A3-C935E18DD9D7@stanford.edu>


Released mine too since I need oxygen as well

Sent from my HTC One? X, an AT&T 4G LTE smartphone

----- Reply message -----
From: "Zhiqiang Guo" <zguo at stanford.edu>
To: "mrc" <mrc at snf.stanford.edu>
Subject: MRC slot released due to RF power short
Date: Sat, Jul 21, 2012 12:11 AM




RF power will not last for more than 3 minutes for oxygen plasma recipe, which is not enough for my process.
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From mbaennin at stanford.edu  Mon Jul 30 16:08:39 2012
From: mbaennin at stanford.edu (Matthias Baenninger)
Date: Mon, 30 Jul 2012 16:08:39 -0700 (PDT)
Subject: Ion Mill at SNC
In-Reply-To: <1615794911.33309383.1343689235607.JavaMail.root@zm04.stanford.edu>
Message-ID: <1790254949.33315832.1343689719089.JavaMail.root@zm04.stanford.edu>

Dear MRC users,

With the MRC etcher down for maintenance, I wanted to point out that there is a very nice ion mill etcher at the Stanford Nanocenter (SNC) available to both Stanford and non-Stanford users, which could be a great alternative.
http://www.stanford.edu/group/snc/equipment/ion%20beam%20mill.html

It does "only" non-reactive Ar ion milling, but is nevertheless very versatile (control of ion energy and intensity) and shows great reproducibility. It can fit up to 4 inch wafers onto its cooled stage but is also suitable for small pieces. A great feature is the tiltable rotating stage, which helps avoid side wall re-deposition (fencing).

I am in charge of training and support for the ion mill, please let me know if you are interested in using the tool.

Best,
Matthias

-----------------------------------
Matthias Baenninger, PhD
Goldhaber-Gordon Group
Stanford University
McCullough Bldg., Room 224
476 Lomita Mall
Stanford
CA 94305-4008
USA
Phone: +1 (650) 723-5892
-----------------------------------