Re: MRC slot released due to RF power short

Joanie Ouyang jouyang at stanford.edu
Sat Jul 21 09:36:45 PDT 2012


Released mine too since I need oxygen as well

Sent from my HTC One™ X, an AT&T 4G LTE smartphone

----- Reply message -----
From: "Zhiqiang Guo" <zguo at stanford.edu>
To: "mrc" <mrc at snf.stanford.edu>
Subject: MRC slot released due to RF power short
Date: Sat, Jul 21, 2012 12:11 AM




RF power will not last for more than 3 minutes for oxygen plasma recipe, which is not enough for my process.
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/mrc/attachments/20120721/3fc5acd3/attachment.html>


More information about the mrc mailing list