From mcvittie at snf.stanford.edu Tue Jan 7 09:04:29 2003 From: mcvittie at snf.stanford.edu (Jim McVittie) Date: Tue, 07 Jan 2003 09:04:29 -0800 Subject: Problem nanospec 2003-01-05 15:32:41: Both Nanospec machine do not work Message-ID: <3E1B089D.544B1F9C@snf.stanford.edu> I am very surprized that you are having problems with the Nanospecs. I ran oxide calibrations on both Nanospecs yesterday morning and found no problems. I found that they agreed within 2% to measurements that I did on Ellipsometer. I did measurements at 1200A and at 5300A. I will look at the Nanospecs again today. Can you give more detailed information on what you found. Jim McVittie From mcvittie at snf.stanford.edu Fri Jan 17 12:58:51 2003 From: mcvittie at snf.stanford.edu (Jim McVittie) Date: Fri, 17 Jan 2003 12:58:51 -0800 Subject: Problem nanospec 2003-01-17 13:01:13: in litho Message-ID: <3E286E8B.B3493E8A@snf.stanford.edu> Nanospec Users, I have checked the calibrations on both nanospecs several times since Jan 1. They both were agreed with the ellipsometer within a few percent. I am working on the problems on both nanospecs. Intermittent shut -- On the litho tool, this afternoon I plan on seeing if the problem is indeed caused by the PC by replacing it temporarily with a laptop. Noisy Photo signal -- Although we are getting good measurements on the nanospec near Drytek2, there is a lot of noise in the photo signal. I took the photo unit apart the other night and did not find any problems. I will try looking at the supply voltages this weekend. Note that for good undoped Poly thicknesses on this tool, you need to use the default ni (3.00) and not the ni (near 4.00) from a ellipsomter measurement or the default ni (near 4.00) from the other nanospec. Jim McVittie From mcvittie at snf.stanford.edu Fri Jan 17 18:57:28 2003 From: mcvittie at snf.stanford.edu (Jim McVittie) Date: Fri, 17 Jan 2003 18:57:28 -0800 Subject: Nanospec Problems References: <3E286E8B.B3493E8A@snf.stanford.edu> Message-ID: <3E28C298.6B292BBD@snf.stanford.edu> Nanospec Users, Rohit Shenoy and I spend a bit of time this evening trying to solve the Nanospec problem. Litho Nanospec -- We believe that the intermittent shut problem was caused by the floppy drive. The system was not setup properly in that it was running in DOS off the floppy. We modified the Autoexec and Config files to allow the system to boot up in DOS on the C drive. It no longer uses the floppy drive during operation or during booting. Hopefully, this will solve the problem. We did not see any clashes after we made these changes. Drytek2 Nanospec -- The noisy measurements indication by the photointensity readout appears to be a display problem. When we placed a voltmeter on the actual signal going to the computer, we found that was no noise problem. So there should be no problems with the actual measurement which agrees with the calibration measurements that I made. In the weeks ahead, I will try to solve the display problem. Jim McVittie Jim McVittie wrote: > Nanospec Users, > > I have checked the calibrations on both nanospecs several times since > Jan 1. They both were agreed with the ellipsometer within a few percent. > I am working on the problems on both nanospecs. > > Intermittent shut -- On the litho tool, this afternoon I plan on seeing > if the problem is indeed caused by the PC by replacing it temporarily > with a laptop. > > Noisy Photo signal -- Although we are getting good measurements on the > nanospec near Drytek2, there is a lot of noise in the photo signal. I > took the photo unit apart the other night and did not find any > problems. I will try looking at the supply voltages this weekend. > Note that for good undoped Poly thicknesses on this tool, you need to > use the default ni (3.00) and not the ni (near 4.00) from a ellipsomter > measurement or the default ni (near 4.00) from the other nanospec. > > Jim McVittie From mcvittie at snf.stanford.edu Thu Jan 23 09:14:55 2003 From: mcvittie at snf.stanford.edu (Jim McVittie) Date: Thu, 23 Jan 2003 09:14:55 -0800 Subject: More Nanospec Problems References: <3E286E8B.B3493E8A@snf.stanford.edu> <3E28C298.6B292BBD@snf.stanford.edu> Message-ID: <3E30230F.1D387D37@snf.stanford.edu> Nanospec Users, Wednesday evening, I found the light bulb out the litho area nanospec was out. I replaced the bulb. The light did not come on until I wiggled the wire carrying thye power to the bulb. It was running ok when I left. I did not have time to find the loose connection. We will most likely see this bulb problem again until we fix the loose connection. Also on Wednesday evening, I found the grading motor mechanism had jamed on the Nonospec near the Drytek. I powered down the unit until I have time to fix the problem. I believe problem is being caused by the disintegration of the foam light barrier around the view window for the position counter. Jim