Comment nanospec2 SNF 2008-06-20 18:05:20: Nano in Litho Area

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri Jun 20 18:05:21 PDT 2008


Checked and replaced the halogen lamp. Did lamp position adjustments as per manual. Checked and adjusted gain as per manual(set to 66.0). Did lamp intensity test as per manual at 2 wavelengths- Looks good. Standard measured by Uli looks good. Verified gain setting later in the day - still 66.0. Will continue to monitor the system for stability.




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