From rhenn at snf.stanford.edu Mon Apr 19 15:45:13 2010 From: rhenn at snf.stanford.edu (rhenn at snf.stanford.edu) Date: Mon, 19 Apr 2010 15:45:13 -0700 Subject: Problem nanospec2 SNF 2010-04-19 15:45:12: secs send in progress Message-ID: On the nanospec in litho, frequently recieve "secs send in progress. try:1" The tool pauses for about 10 seconds before completing the desired operation. From vilanova at snf.stanford.edu Wed Apr 21 07:55:01 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 21 Apr 2010 07:55:01 -0700 Subject: Problem nanospec2 SNF 2010-04-19 15:45:12: secs send in progress Message-ID: Checked sysmte and I could not repeat the problem, maybe someone else reset the system and now is working Fine.