Problem nanospec2 SNF 2010-04-19 15:45:12: secs send in progress

rhenn at snf.stanford.edu rhenn at snf.stanford.edu
Mon Apr 19 15:45:13 PDT 2010


On the nanospec in litho, frequently recieve "secs send in progress. try:1" The tool pauses for about 10 seconds before completing the desired operation. 




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