[Ox-35] Please return ox-35 to proper state after running process

Alexander Yukio Piggott piggotta at stanford.edu
Tue May 14 15:08:49 PDT 2013


Hi all,

I found the ox-35 etcher in a...weird state when I came in today: the
loadlock was vented, the control software was turned off, and the dummy
wafer was missing.

When finished using the ox-35, please:
1) Leave the (clean) dummy Si wafer in the loadlock.
2) Pump down the loadlock.
3) Leave the software running, but place it in the "View only" mode to
prevent unauthorized usage.

Thanks!

Cheers,
Alex
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