Tencor P2 Scheduled downtime- Next week

Gary J Sosa gsosa at stanford.edu
Thu Apr 14 11:23:39 PDT 2011

Hello Tencor P2 Users..

   We have scheduled some downtime next week on April 19th and 20th so that the wafer stage can be serviced. Starting Tuesday 4/19 at 9:30am the tool will be down and unavailable for use. The vendor will remove the wafer stage and repair it offsite. On Wednesday 4/20, the vendor will re-install the stage, set up and test operation. The tool should be up in the afternoon. Please plan your time accordingly regarding this downtime and check Coral for any status changes. Thanks and sorry for the inconvenience.

      Regards.. Gary

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