[p5000etch-pcs] Shutdown p5000etch SNF 2013-08-05 22:43:28: Wafer transfer fail

joonsohn at stanford.edu joonsohn at stanford.edu
Mon Aug 5 22:43:29 PDT 2013


Wafer arm dropped wafers while transferring wafers to chamber C. I put in 4 wafers. But, I can only see 3 wafers. 
Sorry for your inconvenience.
Joon Sohn


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