[p5000etch-pcs] Problem p5000etch SNF 2013-08-09 14:39:10: Ch.A is Down for heat exchanger

elmere at stanford.edu elmere at stanford.edu
Fri Aug 23 07:48:17 PDT 2013


Heat exchanger flow has been restored after flushing out the cooling lines.  User ran wafers with no problems.


More information about the p5000etch-pcs mailing list