From ludwig at snf.stanford.edu  Tue Feb  5 15:38:31 2013
From: ludwig at snf.stanford.edu (ludwig at snf.stanford.edu)
Date: Tue, 5 Feb 2013 15:38:31 -0800 (PST)
Subject: [p5000etch-pcs] Comment p5000etch SNF 2013-02-05 15:38:30: chipped
	wafer in Ch. B
Message-ID: <8979898.66.1360107511159.JavaMail.coral@snc-coraldb.stanford.edu>

Xin and I etched a wafer for 240sec, and when the weafer came out , it was chipped in 3-4 places
Warning: the small pieces might still be in the chamber B

From junam at stanford.edu  Sat Feb  9 17:15:21 2013
From: junam at stanford.edu (junam at stanford.edu)
Date: Sat, 9 Feb 2013 17:15:21 -0800 (PST)
Subject: [p5000etch-pcs] Problem p5000etch SNF 2013-02-09 17:15:21: cannot
 bring Chambaer C to Online
Message-ID: <11944783.28.1360458921811.JavaMail.coral@snc-coraldb.stanford.edu>

Chamber C is offline, and cannot process any recipe in there. Could not bring up the chamber to online.

From elmere at stanford.edu  Mon Feb 11 08:16:20 2013
From: elmere at stanford.edu (elmere at stanford.edu)
Date: Mon, 11 Feb 2013 08:16:20 -0800 (PST)
Subject: [p5000etch-pcs] Problem p5000etch SNF 2013-02-09 17:15:21:
 cannot bring Chambaer C to Online
Message-ID: <22846925.37.1360599380826.JavaMail.coral@snc-coraldb.stanford.edu>

Another user brought the chamber online

From elmere at stanford.edu  Mon Feb 11 08:16:48 2013
From: elmere at stanford.edu (elmere at stanford.edu)
Date: Mon, 11 Feb 2013 08:16:48 -0800 (PST)
Subject: [p5000etch-pcs] Comment p5000etch SNF 2013-02-11 08:16:48: Checking
	Ch.B for chips
Message-ID: <24732423.38.1360599408894.JavaMail.coral@snc-coraldb.stanford.edu>


From kokab at stanford.edu  Mon Feb 25 00:35:14 2013
From: kokab at stanford.edu (kokab at stanford.edu)
Date: Mon, 25 Feb 2013 00:35:14 -0800 (PST)
Subject: [p5000etch-pcs] Shutdown p5000etch SNF 2013-02-25 00:35:13: my
 wafers all stuck inside
Message-ID: <13771874.0.1361781314224.JavaMail.coral@snc-coraldb.stanford.edu>


From elmere at stanford.edu  Mon Feb 25 10:47:22 2013
From: elmere at stanford.edu (elmere at stanford.edu)
Date: Mon, 25 Feb 2013 10:47:22 -0800 (PST)
Subject: [p5000etch-pcs] Shutdown p5000etch SNF 2013-02-25 00:35:13: my
 wafers all stuck inside
Message-ID: <21303071.11.1361818042168.JavaMail.coral@snc-coraldb.stanford.edu>

Recoved the user's wafers and placed them in a cassette.  The cassette box is on the P5000 table's bottom shelf.

From elmere at stanford.edu  Mon Feb 25 10:47:37 2013
From: elmere at stanford.edu (elmere at stanford.edu)
Date: Mon, 25 Feb 2013 10:47:37 -0800 (PST)
Subject: [p5000etch-pcs] Comment p5000etch SNF 2013-02-11 16:06:29:
	Update
Message-ID: <20754923.12.1361818057210.JavaMail.coral@snc-coraldb.stanford.edu>

Archived

From elmere at stanford.edu  Mon Feb 25 10:47:48 2013
From: elmere at stanford.edu (elmere at stanford.edu)
Date: Mon, 25 Feb 2013 10:47:48 -0800 (PST)
Subject: [p5000etch-pcs] Comment p5000etch SNF 2013-02-11 08:16:48:
 Checking Ch.B for chips
Message-ID: <32052357.13.1361818068245.JavaMail.coral@snc-coraldb.stanford.edu>

Archived