[p5000etch-pcs] Problem p5000etch SNF 2013-10-15 16:03:18: wafer stuck in loadlock chamber

aslani at stanford.edu aslani at stanford.edu
Tue Oct 15 16:03:19 PDT 2013


the arm stopped moving and does not switch to autimatic.


More information about the p5000etch-pcs mailing list