[p5000etch-pcs] Problem p5000etch SNF 2013-10-16 19:48:15: Ch B Helium Flow off Limits Error

ftouf at stanford.edu ftouf at stanford.edu
Wed Oct 16 19:48:16 PDT 2013


First wafer I was able to resume recipe and worked. Second wafer I tried several times to resume or restart step, but failed.
Thanks,
Filippos


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