[p5000etch-pcs] Problem p5000etch SNF 2013-10-29 23:11:34: wafer stuck on the arm

aslani at stanford.edu aslani at stanford.edu
Tue Oct 29 23:11:35 PDT 2013

Dummy wafer is stuck inside. It is sitting on the arm behind the door. could not switch to manual mode to bring it back to cassett. 

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