[p5000etch-pcs] Problem p5000etch SNF 2013-10-29 23:11:34: wafer stuck on the arm

aslani at stanford.edu aslani at stanford.edu
Tue Oct 29 23:11:35 PDT 2013


Dummy wafer is stuck inside. It is sitting on the arm behind the door. could not switch to manual mode to bring it back to cassett. 


More information about the p5000etch-pcs mailing list