[p5000etch-pcs] Problem p5000etch SNF 2013-10-29 23:11:34: wafer stuck on the arm

elmere at stanford.edu elmere at stanford.edu
Wed Oct 30 09:15:02 PDT 2013


User did not input a process recipe which took Ch.B offline.  Recovered his wafer and ran 8 wafers with no issues.


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