From mcvittie at cis.Stanford.EDU  Fri Apr 13 14:25:46 2001
From: mcvittie at cis.Stanford.EDU (Jim McVittie)
Date: Fri, 13 Apr 2001 14:25:46 -0700 (PDT)
Subject: Problems with Thick Resist in Etchers
Message-ID: <Pine.SOL.4.05.10104131417110.8005-100000@cis>

Lam, P5000, and Amtetcher Users,

We just had major problems in both the Lam and P5000 due a user
etching wafers with thick resist on them. Both machines were brought down
and needed complete manual chamber cleans. PLEASE FOLLOW THE RULES and
stay with thin resist (< 2 um) for wafers going into the Lam, P5000, and
Amtetcher.   

	Thanks,   Jim 	
--------------------------------------------------------------
James P. McVittie	                Senior Research Scientist
Allen Center for Integrated Systems     jmcvittie at stanford.edu
Stanford University             	Tel: (650) 725-3640	
Rm. 336, 330 Serra Mall			Fax: (650) 723-4659
Stanford, CA 94305-4075