From rcrane at snf.stanford.edu  Mon Aug  6 17:29:41 2001
From: rcrane at snf.stanford.edu (Dick Crane)
Date: Mon, 06 Aug 2001 17:29:41 -0700
Subject: Toxic gas tests complete
Message-ID: <3B6F3675.B7C5D461@snf.stanford.edu>

The toxic gas alarm system tests are now complete. All tools using toxic
gases are back up with the following exceptions:
tylanpoly
tylanbpsg
tylanSiGe
tystar 1
EPI

Silane MFC calibrations are still being completed. Tools should be up
tomorrow.

Thanks,

Dick


From latta at snf.stanford.edu  Tue Aug 21 10:59:10 2001
From: latta at snf.stanford.edu (Nancy Latta)
Date: Tue, 21 Aug 2001 10:59:10 -0700
Subject: Etcher reserved all tomorrow (8/22)
Message-ID: <3B82A16E.310F419@snf.stanford.edu>

Folks,

I will be doing a contamination study on chamber A tomorrow which
requires two (befroe and after) wet chamber cleans.  I cannot have any
other work go into chamber A during this series of tests.

Please talk to me if you need to use the machine with any other chamber
besides A.

Thanks,

			Nancy


From latta at snf.stanford.edu  Wed Aug 22 16:38:06 2001
From: latta at snf.stanford.edu (Nancy Latta)
Date: Wed, 22 Aug 2001 16:38:06 -0700 (PDT)
Subject: Done!
Message-ID: <Pine.LNX.4.04.10108221637080.7299-100000@snf.stanford.edu>

Folks,

I am finished with the contamination tests on Chamber A.

Thanks for your cooperation today.

				Nancy