Nitride etch rates?

Nancy Latta latta at snf.stanford.edu
Fri Jan 12 10:47:54 PST 2001


Folks,

I am trying to gather up information on nitride etch rates in the oxide
and Si chambers.  Can you pass me anything you have in you notes which
might be helpful?

I'll be happy to print the info up for all to use.

Thanks,

				Nancy




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