Toxic gas shutdown Aug. 6
rcrane at snf.stanford.edu
Mon Jul 30 16:19:01 PDT 2001
On Monday, August 6, 2001, from 0800 to 1600, the toxic gas distribution
system will shut down to allow reprogramming and testing of the gas
detection system as part of the fire alarm upgrade.
The following tools will be affected:
STSdep, EPI, PECVD, Plasmaquest, LAMpoly, P5000etch, AMTetcher,
TylanSiGe, Tylanpoly, TylanBPSG, Tylannitride, and Tystar.
The system will be tested during the day with occasional audio and
strobe test alarms. Please disregard toxic (blue light) alarms from 0800
to 1600 on Monday, August 6.
More information about the p5000etch