From song_pang at yahoo.com  Wed May  2 17:18:07 2001
From: song_pang at yahoo.com (Song Pang)
Date: Wed, 2 May 2001 17:18:07 -0700 (PDT)
Subject: Unstable pressure at CHB 
Message-ID: <20010503001807.9517.qmail@web1906.mail.yahoo.com>

When I used CHB Timed recipe for oxide etch this
afternoon, an very unstable pressure condition was
observed occasionally on wafers (1 of 8).  It seems
that was due to the throttle valve, throttle step
varied from 0 to 70 at those cases.

Song

__________________________________________________
Do You Yahoo!?
Yahoo! Auctions - buy the things you want at great prices
http://auctions.yahoo.com/


From booth at snf.stanford.edu  Wed May 23 14:36:46 2001
From: booth at snf.stanford.edu (Len Booth)
Date: Wed, 23 May 2001 14:36:46 -0700
Subject: P5000 Ch C Silicon etch status
Message-ID: <3B0C2D6E.56F12E74@snf.stanford.edu>

P5000 users -
	
The Chamber C (silicon etch) is currently DOWN,
because several of the fingers on the wafer
clamp inside the etch chamber have broken off.

Stanford Procurement has told us that the PO has
been placed, and the part will be delivered to
us this Friday May 25th.

I will update you via e-mail if there are
any changes to this schedule.
			Len


From booth at snf.stanford.edu  Fri May 25 06:30:42 2001
From: booth at snf.stanford.edu (Len Booth)
Date: Fri, 25 May 2001 06:30:42 -0700
Subject: Wafer Sequence on P5000
Message-ID: <3B0E5E82.841539E1@snf.stanford.edu>

Users -
	There is a wafer sequence on our P5000
named "B to D".  does anyone know who uses this
sequence, or who created it?
			Len