Unstable pressure at CHB

Song Pang song_pang at yahoo.com
Wed May 2 17:18:07 PDT 2001


When I used CHB Timed recipe for oxide etch this
afternoon, an very unstable pressure condition was
observed occasionally on wafers (1 of 8).  It seems
that was due to the throttle valve, throttle step
varied from 0 to 70 at those cases.

Song

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