P5000 Ch C Silicon etch status

Len Booth booth at snf.stanford.edu
Wed May 23 14:36:46 PDT 2001

P5000 users -
The Chamber C (silicon etch) is currently DOWN,
because several of the fingers on the wafer
clamp inside the etch chamber have broken off.

Stanford Procurement has told us that the PO has
been placed, and the part will be delivered to
us this Friday May 25th.

I will update you via e-mail if there are
any changes to this schedule.

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