From booth at snf.stanford.edu  Fri Nov  2 15:03:28 2001
From: booth at snf.stanford.edu (Len Booth)
Date: Fri, 02 Nov 2001 15:03:28 -0800
Subject: P5000etch Ch.B oxide etch is down
Message-ID: <3BE32640.5438BD40@snf.stanford.edu>

Users -
	The oxide etch chamber is down until I
can get some replacement quartz parts for the
chamber.  Applied has initially quoted Dec 31
for delivery, but we are trying to expedite this.
I should be able to have a better idea of when
we will get parts early next week.
	Meanwhile Chambers A, C, & D are
up for processing.
			Len


From booth at snf.stanford.edu  Tue Nov  6 10:16:51 2001
From: booth at snf.stanford.edu (Len Booth)
Date: Tue, 06 Nov 2001 10:16:51 -0800
Subject: Chamber B parts
Message-ID: <3BE82913.60A30DE1@snf.stanford.edu>

I got info from Applied this morning, saying that
the parts for our B chamber will be shipped today,
and should arrive here sometime tomorrow.
			Len


From booth at snf.stanford.edu  Thu Nov  8 08:51:19 2001
From: booth at snf.stanford.edu (Len Booth)
Date: Thu, 08 Nov 2001 08:51:19 -0800
Subject: P5000etch Oxide chamber
Message-ID: <3BEAB807.C4A4CCE4@snf.stanford.edu>

Users -
	The parts arrived yesterday for the oxide 
chamber, and Cesar installed them & tested the
wafer handling last night.  He said everything
looks good, so the shutdown for the Chamber B
oxide process is removed.
			Len