From seymour at snf.stanford.edu Mon Oct 1 14:23:31 2001 From: seymour at snf.stanford.edu (ray seymour) Date: Mon, 01 Oct 2001 14:23:31 -0700 Subject: HBR status Message-ID: <3BB8DED3.AD509F40@snf.stanford.edu> The HBR bottle is in and installed. The bottle is under a 24 hour leak test and if there are no problems it will be released tomorrow afternoon. Any questions please contact me a 47425. Ray Seymour From randythrive at yahoo.com Wed Oct 10 12:34:55 2001 From: randythrive at yahoo.com (Randy True) Date: Wed, 10 Oct 2001 12:34:55 -0700 (PDT) Subject: CH.A Timed program Message-ID: <20011010193455.45819.qmail@web20507.mail.yahoo.com> Someone had changed parameters in the CH.A TIMED program. The only values that are to be changed in this program are the time on the Main and Over Etch. The Step End Control had been changed to "Endpoint", if you want to stop your program using the endpoint use the program CH.A METAL, that's what it is for. You can still watch the endpoint on CH.A TIMED, that's why Endpoint Selection is set to "External Endpoint". Also gas values in the Over Etch Step were changed. DON'T CHANGE THESE VALUES. If you are an experienced user and you do change something, make sure you change it back to the default vaule. Tie a piece of string around your wafer box, put a piece of tape on your coral card, anything so that you remember. This is very important, you risk messing up other people's work. Another thing about the P5000 I'd like to bring up is the log sheets, I don't find them so useful. It doesn't seem necessary to use a whole piece of paper for each run (ie a standard run), and people do not fill the form out uniformly (mainly because the entry blanks are not clear or not applicable). It seems to me that it would make more sense to have a one line entry for each "run" and then another section of the notebook for recipes and process development. Please let me know what you think about this. --Randy True true at snf.stanford.edu __________________________________________________ Do You Yahoo!? Make a great connection at Yahoo! Personals. http://personals.yahoo.com From latta at snf.stanford.edu Wed Oct 10 13:12:42 2001 From: latta at snf.stanford.edu (Nancy Latta) Date: Wed, 10 Oct 2001 13:12:42 -0700 Subject: CH.A Timed program References: <20011010193455.45819.qmail@web20507.mail.yahoo.com> Message-ID: <3BC4ABBA.1F7AE22F@snf.stanford.edu> Folks, It was me who changed the parameters on CH. A TIMED. As you might know, CH. METAL is frozen, meaning you cannot change anything. I was doing an etch which did not fit into the 'standard' mold of CH.METAL, i,e,. 1um AL. Quite honestly, I assumed that everyone was checking the parameters of each recipe before running them to assure that what they wanted was there and hence, I've been using CH. A TIMED for both timed and endpoint programs. True, I should have changed it back, although at this point I am not sure what the 'correct' parameters would be. Anyone else want to weigh in on this issue? But for goodness sakes, folks, CHECK THE RECIPES before you run. I agree on the uselessness of the runsheets. Randy, do you want to take a first pass at what is useful information? Nancy Randy True wrote: > > Someone had changed parameters in the CH.A TIMED > program. The only values that are to be changed in > this program are the time on the Main and Over Etch. > The Step End Control had been changed to "Endpoint", > if you want to stop your program using the endpoint > use the program CH.A METAL, that's what it is for. You > can still watch the endpoint on CH.A TIMED, that's why > Endpoint Selection is set to "External Endpoint". Also > gas values in the Over Etch Step were changed. DON'T > CHANGE THESE VALUES. If you are an experienced user > and you do change something, make sure you change it > back to the default vaule. Tie a piece of string > around your wafer box, put a piece of tape on your > coral card, anything so that you remember. This is > very important, you risk messing up other people's > work. > > Another thing about the P5000 I'd like to bring up is > the log sheets, I don't find them so useful. It > doesn't seem necessary to use a whole piece of paper > for each run (ie a standard run), and people do not > fill the form out uniformly (mainly because the entry > blanks are not clear or not applicable). It seems to > me that it would make more sense to have a one line > entry for each "run" and then another section of the > notebook for recipes and process development. Please > let me know what you think about this. > > --Randy True > true at snf.stanford.edu > > __________________________________________________ > Do You Yahoo!? > Make a great connection at Yahoo! Personals. > http://personals.yahoo.com From song_pang at yahoo.com Wed Oct 10 17:39:24 2001 From: song_pang at yahoo.com (Song Pang) Date: Wed, 10 Oct 2001 17:39:24 -0700 (PDT) Subject: CH.A Timed program In-Reply-To: <20011010193455.45819.qmail@web20507.mail.yahoo.com> Message-ID: <20011011003924.17454.qmail@web20501.mail.yahoo.com> I agree with Randy regarding the run sheet. Song --- Randy True wrote: > Someone had changed parameters in the CH.A TIMED > program. The only values that are to be changed in > this program are the time on the Main and Over Etch. > The Step End Control had been changed to "Endpoint", > if you want to stop your program using the endpoint > use the program CH.A METAL, that's what it is for. > You > can still watch the endpoint on CH.A TIMED, that's > why > Endpoint Selection is set to "External Endpoint". > Also > gas values in the Over Etch Step were changed. DON'T > CHANGE THESE VALUES. If you are an experienced user > and you do change something, make sure you change it > back to the default vaule. Tie a piece of string > around your wafer box, put a piece of tape on your > coral card, anything so that you remember. This is > very important, you risk messing up other people's > work. > > Another thing about the P5000 I'd like to bring up > is > the log sheets, I don't find them so useful. It > doesn't seem necessary to use a whole piece of paper > for each run (ie a standard run), and people do not > fill the form out uniformly (mainly because the > entry > blanks are not clear or not applicable). It seems to > me that it would make more sense to have a one line > entry for each "run" and then another section of the > notebook for recipes and process development. Please > let me know what you think about this. > > --Randy True > true at snf.stanford.edu > > > > __________________________________________________ > Do You Yahoo!? > Make a great connection at Yahoo! Personals. > http://personals.yahoo.com __________________________________________________ Do You Yahoo!? Make a great connection at Yahoo! Personals. http://personals.yahoo.com From song_pang at yahoo.com Wed Oct 10 17:46:56 2001 From: song_pang at yahoo.com (Song Pang) Date: Wed, 10 Oct 2001 17:46:56 -0700 (PDT) Subject: CH.A Timed program In-Reply-To: <3BC4ABBA.1F7AE22F@snf.stanford.edu> Message-ID: <20011011004656.96990.qmail@web20503.mail.yahoo.com> I have parameter details of CHA Time, will print out one and attach in the binder. So everyone can check before using it. Song --- Nancy Latta wrote: > Folks, > > It was me who changed the parameters on CH. A TIMED. > As you might know, > CH. METAL is frozen, meaning you cannot change > anything. I was doing an > etch which did not fit into the 'standard' mold of > CH.METAL, i,e,. 1um > AL. > > Quite honestly, I assumed that everyone was checking > the parameters of > each recipe before running them to assure that what > they wanted was > there and hence, I've been using CH. A TIMED for > both timed and endpoint > programs. > > True, I should have changed it back, although at > this point I am not > sure what the 'correct' parameters would be. Anyone > else want to weigh > in on this issue? > > But for goodness sakes, folks, CHECK THE RECIPES > before you run. > > I agree on the uselessness of the runsheets. Randy, > do you want to take > a first pass at what is useful information? > > Nancy > > Randy True wrote: > > > > Someone had changed parameters in the CH.A TIMED > > program. The only values that are to be changed in > > this program are the time on the Main and Over > Etch. > > The Step End Control had been changed to > "Endpoint", > > if you want to stop your program using the > endpoint > > use the program CH.A METAL, that's what it is for. > You > > can still watch the endpoint on CH.A TIMED, that's > why > > Endpoint Selection is set to "External Endpoint". > Also > > gas values in the Over Etch Step were changed. > DON'T > > CHANGE THESE VALUES. If you are an experienced > user > > and you do change something, make sure you change > it > > back to the default vaule. Tie a piece of string > > around your wafer box, put a piece of tape on your > > coral card, anything so that you remember. This is > > very important, you risk messing up other people's > > work. > > > > Another thing about the P5000 I'd like to bring up > is > > the log sheets, I don't find them so useful. It > > doesn't seem necessary to use a whole piece of > paper > > for each run (ie a standard run), and people do > not > > fill the form out uniformly (mainly because the > entry > > blanks are not clear or not applicable). It seems > to > > me that it would make more sense to have a one > line > > entry for each "run" and then another section of > the > > notebook for recipes and process development. > Please > > let me know what you think about this. > > > > --Randy True > > true at snf.stanford.edu > > > > __________________________________________________ > > Do You Yahoo!? > > Make a great connection at Yahoo! Personals. > > http://personals.yahoo.com __________________________________________________ Do You Yahoo!? Make a great connection at Yahoo! Personals. http://personals.yahoo.com From booth at snf.stanford.edu Thu Oct 11 10:13:40 2001 From: booth at snf.stanford.edu (Len Booth) Date: Thu, 11 Oct 2001 10:13:40 -0700 Subject: P5000 recipes Message-ID: <3BC5D344.2FF85614@snf.stanford.edu> Users - In each of the binders at the machine, the first section has logsheets, and the second section has recipe forms which are filled out when new recipes are created (for that specific chamber). This is our "official" record of the original recipe parameters. Every user should compare the hardcopy of the recipe that will be run, to the currently loaded recipe on the monitor, to verify that all parameters are correct, every time a recipe is loaded. Since the machine is shared by many different users, it is not safe to assume that the previous user left a recipe in the configuration that you will need. New users are instructed to do this by Nancy. Also, only the recipes documented in these recipe forms and approved by Jim McVittie, are not subject to deletion during maintenance procedures. As time permits, I will be cleaning up the unauthorized recipes on the system. Len From randythrive at yahoo.com Tue Oct 16 11:55:55 2001 From: randythrive at yahoo.com (Randy True) Date: Tue, 16 Oct 2001 11:55:55 -0700 (PDT) Subject: etch logs and season wafers Message-ID: <20011016185555.66847.qmail@web20501.mail.yahoo.com> I just put some new etch logs in the front of each binder. After talking to Len and some users, it seems like we don't need one page per use so the new form is shorter and simpler. Some explanations of the fields are at the bottom. If there's any confusion about this, please let me know. I'd like to propose that the next thing we organize is the seasoning wafers for the different chambers. We should try and define what they are for the different chambers (Unpatterned PR on Si, Patterned PR on Alum, etc.) and then outline a way to store them so that you can tell which ones have been used and which haven't (something like used at one end/unused at the other or 2 separate boxes). Nancy, what do you think? --Randy __________________________________________________ Do You Yahoo!? Make a great connection at Yahoo! Personals. http://personals.yahoo.com